Manual
PRODUCT
DESCRIPTION
The Seren R601 is a second-generation, 600 Watt RF generator is available in 1.7-2.1, 12.56, 13.56, 27.12 and 40.68 MHz versions. This compact, air-cooled unit is designed to exceed the most stringent vacuum processing demands. The R601 can be used as the sole source for plasma generation, as a Bias generator, or as one of several generators in a multiple generator configuration. The front panel controls and indicators are logically grouped, with operational status shown on the front panel four line fluorescent display. Seren “R Series” products incorporate a single surface mount technology printed circuit board for controls and RF amplifier. The RF amplifier is powered by a rugged switch - mode power supply.
Seren “R Series” products utilize Field-Effect Transistors in the exciter and power amplifier stages. The unit operates in a class AB mode providing power accuracy and stability across the entire power range.
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MODEL R601
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Power Output 600 Watts |
| Frequency |
1.7-2.1, 12.56, 13.56, 27.12 or 40.68 MHz |
| Forward Power Metering |
+ /-1% Full Scale, +/-1% Reading |
| Output Power Stability |
+/0.5% Long Term, +/-1%Watt |
| Harmonics |
-55 dBc |
| Input Power |
95 – 125 VAC or 190 – 250 VAC,
47-63 Hz |
| Output Connector |
Type "N" Female |
| Interface Connectors |
Serial: DB-9 Female; Analog: DB-25 Female |
| Pulsing |
10 kHz, 50 micro sec. /min. pulse |
| Cooling |
Forced Air, 110 CFM (52 L/Sec.) |
| Dimensions |
7" H x 9.5" W x 18.5 D (in.) |
| Weight |
33 lbs. |