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PRODUCT DESCRIPTION

Seren “AT Series“ automatic matching networks automatically transform plasma impedances to 50 Ohms, regardless of load variations with the advanced, intelligent, MC-2 matching network controller. 

MC-2 CONTROLLER

The MC-2 Controller is designed to meet the required accuracy and repeatability of the most demanding processes. MC-2 controller standard features include: independent selection of Auto /Manual Operation of either or both Load and Tune Capacitors, Record Strike Preset, Programmable Internal and External Presets, Back-Out Feature, Probe Select, Probe
Attenuation Factor and Programmable Limits. The MC-2 front panel controls and indicators are logically grouped, with operational status displayed on a four line Vacuum Fluorescent Display. Available display information: Generator Forward Power, Generator Reflected Power, DC or RF Probe Voltage, Capacitor Positions, Preset
Positions and Phase/Magnitude Error Signals.

The MC2 Controller’s Loop-Through Interface provides a single point interface for the generator and matching network.

MATCHING NETWORK

Seren AT Series matching networks components are conservatively rated for continuous duty. "L" or inverted “L” configurations are available, to accommodate a wide range of impedances and MC-2 Controller CE-Marked (EMC and Safety) applications. Both configurations feature low losses and wide tuning ranges.